PVD-Consumables - E-Beam Crucibles
Summit-Tech provides E-Beam crucibles and formed cones which fit directly into the E-Beam source crucible. Both the crucibles and cones are available in a variety of materials.
Crucibles are recommended for many E-Beam evaporation processes because they:
Increase the evaporation rate to reduce cycle time and improve throughput
Enable quick material changes to minimize chamber downtime
Improve thermal stability and reduce heat transfer to the crucible
Reduce power requirements and lower the cost of ownership
Available Crucible Materials
Summit-Tech provides crucibles in 14 different materials. These include:
Graphite (C )
Molybdenum (Mo)
Aluminum oxide (Al2O3)
Zirconium oxide (ZrO2)
Vitreous carbon (Glassy-Coated Carbon)
Boron nitride (BN)
Intermetallic (BN/TiB2)
Tungsten (W)
Quartz (SiO2)
Zirconium (Zr)
Tantalum (Ta)
Copper (Cu)
PBN
Titanium carbide (TiC)
Graphite Crucibles
Materials evaporated from graphite crucibles:
Al-Ge alloys, Al-Si alloys, B, Be, Bi, CdS, CeO2, Cr, Cu, Ge, In, Mg, Mo, Na3AlF6, Pd, Pt, Sb, SiO, SiO2, Sr, Ta, Ti, Y2O3, Zn
No
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
34
35
36
37
38
Pocket Volume
(cc)
4
7
N/A
40
40
N/A
40
40
30
30
156
15
15
N/A
N/A
25
62
16
1
2
3
4
7
12
25
30
100
25
25
30
40
4
20
12
1
10
NA
NA
Liner Volume
(cc)
1.8
4.4
2.4
30.4
17
126
30.2
16.9
20.2
10.3
94.7
8.2
3.9
27.1
16.2
17.1
47.6
14.7
0.32
0.84
1.44
2.1
3.7
8.3
16.3
21.9
82.7
12.8
14
18.5
27
1.6
14.6
5.6
0.24
4.8
2.8
2.3
Dim A
(in.)
0.865
1.167
0.936
2.03
2.03
2.96
2
2
1.775
1.775
3.25
1.48
1.48
2.39
1.89
1.85
2.212
1.64
0.56
0.706
0.805
0.885
1.125
1.28
1.633
1.92
2.7
1.85
1.633
1.775
2.03
0.846
1.673
1.35
0.75
1.384
0.781
0.75
Dim B
(in.)
0.563
0.563
0.593
1.02
1.02
1.562
1.062
1.062
0.94
0.94
1.53
0.67
0.67
1
0.7
0.68
1.4
0.97
0.384
0.465
0.545
0.595
0.52
0.94
0.94
0.81
1.49
0.68
0.94
0.94
1.02
0.689
0.748
0.68
0.162
0.593
0.437
0.312
Dim C
(in.)
0.093
0.093
0.093
0.093
0.25
0.093
0.093
0.25
0.093
0.25
0.25
0.125
0.25
0.25
0.125
0.093
0.093
0.125
0.093
0.093
0.093
0.093
0.093
0.093
0.093
0.093
0.093
0.125
0.125
0.125
0.125
0.093
0.093
0.125
0.04
0.093
0.062
0.75
Angle D
15°
15°
15°
15°
15°
7.5°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
15°
30°
15°
14°
0°
Pyrolytic Boron Nitride (PBN) Crucibles
Our high temperature Chemical Vapor Deposition (CVD) process yields intrinsically pure Pyrolytic Boron Nitride (PBN). Performance PBN is the ideal choice for furnace, electrical, microwave, and semiconductor components
Pyrolytic Boron Nitride
Performance PBN's properties, its intrinsic purity, superior mechanical strength,
and thermal stability make it a superb choice for high temperature furnace and
electrical components; microwave and semiconductor components; and industry
standardized crucibles for gallium arsenide crystal (GAN) production.
Other properties featured in our Performance PBN include:
Good thermal conductivity
High insulation resistance
High dielectric strength over wide temperature ranges.
Extremely pure
Non-wetting
Non-toxic
Non-reactive to most other compounds
Withstands high temperatures and rapid cooling
Performance PBN will not react with acids, alkalis, organic solvents, molten metals, or Graphite. Bulk impurity levels are less than 100 parts per million with metallic impurities less than 10 parts per million. It withstands 1800° C in vacuum and 2000° C in nitrogen, showing no melting point, making it an excellent choice for furnace components and melting vessels. Crucibles heated to 1200°C can be plunged into liquid nitrogen without visible damage. PBN-coated graphite heating elements provide extremely uniform temperature profiles for both compound and silicon semiconductor manufacturing.
The anisotropic conductivity of Performance PBN improves process performance for crystal growth, whether the growth method is Liquid Encapsulated Czochralski (LEC), Vertical Gradient Freeze (VGF), or Bridgman. The high purity and physical stability of this unique material also make it the best choice for auxiliary effusion cell hardware use.
For more information on our Pyrolytic Boron Nitride material, contact us today.
Aluminum Oxide Crucibles (Al2O3)
Aluminium Oxide, Al2O3 is a major engineering material. It offers a combination of good mechanical properties and electrical properties leading to a wide range of applications.
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